Effects of the Length of the Anode Cylinder in the Miniature Sputter Ion Pump on the Pumping Characteristics

doi:10.12068/j.issn.1005-3026.2023.11.012

Abstract

Abstract: Based on the particle-in-cell(PIC)method and the Monte Carlo method， the software of VSim was used to analyze the Penning discharge of the miniature sputter ion pump(SIP). A two-dimensional simulation model was established， and the parameters such as the incident energy， the incident angle， and the incident position on the cathode plate were obtained. The non-vertical sputtering yield theory was combined with the simulation results， and the distribution law of the sputtering yield on the cathode plate was obtained. According to the ion incident parameters and the sputtering yield， the pumping speed of the miniature SIP for nitrogen was calculated. The calculated values are in good agreement with the experimental results， and the method can accurately give the pressure corresponding to the threshold value of the pumping speed. In the simulation results， the length of the anode barrel can effectively reduce the pressure corresponding to the threshold value of the pumping speed. Meanwhile， it was also proved by experiments.

Key words: Penning discharge; plasma simulation; Monte Carlo; sputtering yield; pumping speed

CLC Number:

TB753

GENG Jian， WANG Xiao-dong， GUO Mei-ru， REN Zheng-yi. Effects of the Length of the Anode Cylinder in the Miniature Sputter Ion Pump on the Pumping Characteristics[J]. Journal of Northeastern University(Natural Science), 2023, 44(11): 1596-1603.

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