Journal of Northeastern University(Natural Science)
Modal Analysis of the Rotor System of TurboMolecular Pump Based on FiniteElement Method
WANG Xiaodong， SUN Yan， FANG Liwu， LI Xiaoyong
Journal of Northeastern University Natural Science . 2014, (3): 411 -413 .  DOI: 10.12068/j.issn.1005-3026.2014.03.024