考虑多晶圆流的集束型设备群调度方法

doi:10.12068/j.issn.1005-3026.2016.05.019

东北大学学报:自然科学版 ›› 2016, Vol. 37 ›› Issue (5): 697-701.DOI: 10.12068/j.issn.1005-3026.2016.05.019

考虑多晶圆流的集束型设备群调度方法

周炳海，黎明

(同济大学机械与能源工程学院，上海201804)

收稿日期:2015-04-30 修回日期:2015-04-30 出版日期:2016-05-15 发布日期:2016-05-13
通讯作者: 周炳海
作者简介:周炳海(1965- )，男，浙江浦江人，同济大学教授，博士生导师.
基金资助:
国家自然科学基金资助项目(71471135， 61273035).

Scheduling Method for Multi-cluster Tools with Diverse Wafer Flow Patterns

ZHOU Bing-hai， LI Ming

School of Mechanical Engineering， Tongji University， Shanghai 201804， China.

Received:2015-04-30 Revised:2015-04-30 Online:2016-05-15 Published:2016-05-13
Contact: ZHOU Bing-hai
About author:-
Supported by:
-

摘要/Abstract

摘要： 为有效解决集束型设备群多品种晶圆调度问题，构建考虑多晶圆流集束型设备群调度算法.统筹考虑多晶圆流、驻留和资源约束等特征，并以系统Makespan最小为目标，建立数学模型.集束型设备群调度分解为外层晶圆序列决策和内层机械手调度两个阶段，采用蚁群寻觅结合双向搜索策略，将蚁群算法融合到晶圆时间约束集搜索算法迭代过程中.在此基础上，提出了AS&TC(ant systems and time constraints)调度算法.对该调度算法进行仿真实验分析，结果表明该算法的有效性.

关键词: 集束型设备群, 多晶圆流, 驻留约束, 时间约束集, 启发式算法

Abstract: To deal with scheduling problems of multi-cluster tools (MCTs) with different wafer types effectively， a scheduling algorithm considering diverse wafer flow patterns was put forward. Considered the wafer flow patterns， resource and residency constraints， mathematical programming models were set up with an objective of minimizing the Makespan. The scheduling problem of the single-armed MCTs was divided into two stages: determine the processing sequence of wafer lots and schedule the operating sequence of the robot arms. Applying ant colony search and bidirectional search strategies， ant system algorithm was introduced into the process of dynamic and adaptive time constraint set iterations. A new scheduling algroithm was built based on the ant systems and time (AS & TC). Simulation experiments results indicated that the algorithm is feasible.

Key words: multi-cluster tools(MCTs), diverse wafer flow patterns, residency constraints, time constraint set, heuristic algorithm

中图分类号:

TP29

周炳海，黎明. 考虑多晶圆流的集束型设备群调度方法[J]. 东北大学学报:自然科学版, 2016, 37(5): 697-701.

ZHOU Bing-hai， LI Ming. Scheduling Method for Multi-cluster Tools with Diverse Wafer Flow Patterns[J]. Journal of Northeastern University Natural Science, 2016, 37(5): 697-701.

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考虑多晶圆流的集束型设备群调度方法

Scheduling Method for Multi-cluster Tools with Diverse Wafer Flow Patterns

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