Abstract: Epitaxial La0.5Sr0.5TiO3(LSTO) thin films were prepared by chemical solution deposition as buffer layer for YBCO coated conductor, i.e. the high-temperature 2nd-generation superconducting strip. Lanthanum acetate (La(CH3COO)3 · 1.5H2O), strontium carbonate (SrCO3) and butyl titanium (C16H36O4Ti) were used as precursors to synthesize the precursor solution where the La concentration is about 0.14 mol/L. The precursor solution was deposited by spin-coating method on the substrate and the LSTO film was obtained after proper heat treatment. Differential thermal analysis and thermogravimetric analysis were both made to determine the synthesize process of LSTO film. XRD results showed that the films annealed at 840°C and 890°C are of single-phase LSTO with (100)preferred orientation, and slow temperature rise benefits the crystallization of LSTO films. SEM observation showed that the LSTO films are smooth and dense. The resistivity of these films is about 1 × 10^-2 Ω · cm as the result of four probe method. The epitaxial conductive LSTO films can be a promising buffer layer for YBCO coated conductor.