Research on NC Auxiliary UltraPrecision Positioning Work Platform

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Journal of Northeastern University ›› 2013, Vol. 34 ›› Issue (6): 875-879.DOI: -

• Mechanical Engineering • Previous Articles Next Articles

Research on NC Auxiliary UltraPrecision Positioning Work Platform

CHEN Mingfang¹， ZOU Ping¹， HAN Gang²， HOU Bomin²

1. School of Mechanical Engineering & Automation， Northeastern University， Shenyang 110819， China; 2. Department of Electrical Engineering， Shenyang Vocational and Technical College， Shenyang 110045， China.

Received:2012-12-24 Revised:2012-12-24 Online:2013-06-15 Published:2013-12-31
Contact: CHEN Mingfang
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Abstract

Abstract: Submicron or even nanoscale positioning accuracy is generally required during ultraprecision machining. The positioning accuracy of conventional servo motor and precision ball screw driver can only reach micron level. To improve the positioning accuracy of CNC feed device， this paper proposes a new closedloop displacement compensation control program based on the original positioning device. Displacement resolution and positioning accuracy of the piezoelectric drive micropositioning work platform can reach nanoscale level. Good performances both in static and dynamic stiffness are obtained. The tests show that 10μm stroke ultraprecision micropositioning platform can perfectly compensate the deviation of CNC ball screw positioning and achieve the requirements of ultraprecision machining feed.

Key words: micropositioning, TMS320F28335, eddy current, highprecision data acquisition, feed device

CLC Number:

TG663

CHEN Mingfang， ZOU Ping， HAN Gang， HOU Bomin. Research on NC Auxiliary UltraPrecision Positioning Work Platform[J]. Journal of Northeastern University, 2013, 34(6): 875-879.

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Research on NC Auxiliary UltraPrecision Positioning Work Platform

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