Influence of PEG/WCl6 Ratio on the Morphology and Gas Sensing Properties of WO3 Thin Films

doi:10.12068/j.issn.1005-3026.2019.08.019

Abstract

Abstract: WO₃ thin films were synthesized by a non-hydrolytic sol-gel(NHSG)method in the presence of WCl₆， C₂H₅OH and C₃H₇NO as the precursor as well as the PEG-1000 as the pore former. The influence of PEG/WCl₆ ratio on the morphology and gas sensing properties of WO₃ thin films were investigated.It is shown that WO₃ thin films with uniform morphology， high porosity and large specific surface area were obtained at the PEG/WCl₆ ratio of 0.5. The obtained thin films have a single monoclinic crystal structure and consist of WO₃ crystalline nanoparticles with the diameters of 20~60nm. The gas sensing measurements indicate that WO₃ thin films show n-type semiconductor characteristics and demonstrate excellent gas sensing properties at the optimal operation temperature of 100℃. The film formation mechanism of WO₃ thin films indicates that PEG-1000 may induce the inorganic material to form a three-dimensional porous film structure with high porosity and large specific surface area. The obtained WO₃ porous films are potential sensing materials for the detection of NO₂.

Key words: NHSG, PEG, WO₃ thin film, gas sensing property, film formation mechanism

CLC Number:

TP212

ZHOU Peng-fei， ZHAO Si-kai， WANG Wei， SHEN Yan-bai. Influence of PEG/WCl₆ Ratio on the Morphology and Gas Sensing Properties of WO₃ Thin Films[J]. Journal of Northeastern University Natural Science, 2019, 40(8): 1166-1171.

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Influence of PEG/WCl₆ Ratio on the Morphology and Gas Sensing Properties of WO₃ Thin Films

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