Preparation of Coated Micro-grinding Tools and Experimental Research on Grinding Surface Quality

doi:10.12068/j.issn.1005-3026.2022.05.011

Abstract

Abstract: Coated micro-grinding tools were prepared by vacuum radiofrequency(RF) sputtering. The preparation mechanism of surface coating of micro-grinding tools was discussed. The grinding surface quality of coated micro-grinding tools was experimentally studied for brass materials， and the effects of different processing parameters and factors on the grinding surface properties of coated micro-grinding tools were analyzed. The experimental results showed that with the increase of grinding speed and the decrease of grinding depth and feed speed， the surface roughness of brass shows a decreasing trend， the surface morphology is smoother and the surface quality is better. Under the same grinding process parameters， the grinding force of coated micro-grinding tools is lower than that of uncoated micro-grinding tools. Compared with uncoated micro-grinding tools， coated micro-grinding tools with the same particle size can improve the surface adhesion of wear debris， and increase the service life of coated micro-grinding tools to a certain extent.

Key words: coated micro-grinding tool; surface roughness; grinding force; surface morphology; surface quality

CLC Number:

TH161

WEN Xue-long， WANG Cheng-bao， GONG Ya-dong， SUN Fu-qiang. Preparation of Coated Micro-grinding Tools and Experimental Research on Grinding Surface Quality[J]. Journal of Northeastern University(Natural Science), 2022, 43(5): 681-688.

References

[1]金魁.超导研究中的新技术和新材料专题·编者按［J］.中国科学:物理学，力学，天文学，2021，51(4):5-6.(Jin Kui.New technologies and materials in superconductivity research.editor′s note［J］.Chinese Science:Physics，Mechanics and Astronomy，2021，51(4):5-6.)
[2]Sun Y，Su Z P，Gong Y D，et al.An experimental and numerical study of micro-grinding force and performance of sapphire using novel structured micro abrasive tool［J］.International Journal of Mechanical Sciences，2020，181:105741.
[3]Shen Y Q，Luo J，Liao B，et al.Microstructure，erosion and tribological behaviour of thick DLC coatings by the filtered cathodic vacuum arc combined with a high-voltage pulse power［J］.Materials Research Express，2021，8:066405.
[4]Xie Y L，Deng D X，Pi G，et al.Fabrication of silicon carbide microchannels by thin diamond wheel grinding［J］.The International Journal of Advanced Manufacturing Technology，2020，111(1/2):309-323.
[5]Lionel S，Florian C，Sophie R，et al.Evolution of plasmonic nanostructures under ultra-low-energy ion bombardment［J］.Applied Surface Science，2021，544:148672.
[6]Fang Y C，Cheng Z T，Wang S，et al.Effects of oxidation on the localized surface plasmon resonance of Cu nanoparticles fabricated via vacuum coating［J］.Vacuum，2021，184:109965.
[7]Kuleshov A K，Uglov V V，Rusalsky D P.Hard and wear-resistant niobium，molybdenum carbide layered coatings on WC-Co tools produced by ion bombardment and cathodic vacuum arc deposition［J］.Surface & Coatings Technology，2020，395:125920.
[8]Park H K，Onikura H，Ohnishi O.Development of micro-diamond tools through electroless composite plating and investigation into micro-maching characteristics［J］.Precision Engineering，2010，34(3):376-386.
[9]Aurich J C，Engmann J，Schueler G M，et al.Micro grinding tool for manufacture of complex structures in brittle materials［J］.CIRP，2009，58(1):311-314.
[10]Ren Y H，Li C F，Li W，et al.Study on micro-grinding quality in micro-grinding tool for single crystal silicon［J］.Journal of Manufacturing Processes，2019，42:246-256.
[11]Priyabrata S，Karali P.Cumulative reduction of friction and size effects in micro milling through proper selection of coating thickness of TiAlN coated tool:experimental and analytical assessments［J］.Journal of Manufacturing Processes，2021，67(2):635-654.(上接第666页)

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