Optimal Design of a Micro-displacement Compliant Amplification Mechanism

doi:10.12068/j.issn.1005-3026.2022.07.012

Abstract

Abstract: A pseudo static parametric model of the micro-displacement compliant amplification mechanism is proposed based on the dynamic stiffness matrix of flexible beams and the matrix displacement method. This model can be used for rapid motion prediction and parametric motion analysis for the new mechanism. Then the analytical model of displacement amplification ratio is obtained. A new mechanism is obtained by optimizing the dimensions and shape of the structure based on simulated annealing algorithm. Compared with the original structure， its amplification ratio increases by 9% and the natural frequency is 409Hz. The optimization results are compared with FEA simulations with less than 2% difference， which verifies the accuracy of the model. The amplification ratio variation of the new mechanism with load and input displacement and the influence of manufacturing errors at key joints on output displacement are analyzed. The results show that the X-direction manufacturing errors of the top endpoint and output stage have the greatest influence on the output displacement.

Key words: compliant mechanism; pseudo static model; structural optimization; amplification ratio; natural frequency

CLC Number:

TH122

GUO Fan-yi， SUN Zhi-li， ZHANG Sheng-nan， CAO Ru-nan. Optimal Design of a Micro-displacement Compliant Amplification Mechanism[J]. Journal of Northeastern University(Natural Science), 2022, 43(7): 996-1002.

References

[1]Dang M P，Le H G，Chau N L，et al.A multi-objective optimization design for a new linear compliant mechanism［J］.Optimization and Engineering，2019，21(2):673-705.
[2]Kim D，Lee D Y，Gweon D G.A new nano-accuracy AFM system for minimizing Abbe errors and the evaluation of its measuring uncertainty［J］.Ultramicroscopy，2007，107(4/5):322-328.
[3]Hao L，Hui T，Huang L，et al.A large-stroke flexure fast tool servo with new displacement amplifier［C］//IEEE International Conference on Advanced Intelligent Mechatronics(AIM).Munich:IEEE，2017:52-57.
[4]Yong Y K，Aphale S S，Moheimani S O R.Design，identification，and control of a flexure-based XY stage for fast nanoscale positioning［J］.IEEE Transactions on Nanotechnology，2009，8(1):46-54.
[5]Ding B X，Li Y M.Design and analysis of a decoupled XY micro compliant parallel manipulator［C］//IEEE International Conference on Robotics and Biomimetics(ROBIO 2014).Bali:IEEE，2014:1898-1903.
[6]Choi K B，Lee J J，Kim G H，et al.Amplification ratio analysis of a bridge-type mechanical amplification mechanism based on a fully compliant model［J］.Mechanism and Machine Theory，2018，121355-372.
[7]Chen F，Du Z J，Yang M，et al.Design and analysis of a three-dimensional bridge-type mechanism based on the stiffness distribution［J］.Precision Engineering，2018，51(7):48-58.
[8]Lobontiu N，Garcia E.Analytical model of displacement amplification and stiffness optimization for a class of flexure-based compliant mechanisms［J］.Computers & Structures，2003，81(32):2797-2810.
[9]Ding Y，Lai L J.Design and analysis of a displacement amplifier with high load capacity by combining bridge-type and Scott-Russell mechanisms［J］.Review of Scientific Instruments，2019，90(6):065102.
[10]Zhu W L，Zhu Z，Guo P，et al.A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics［J］.Mechanical Systems and Signal Processing，2018，99(7):747-759.
[11]Li H，Guo F，Wang Y，et al.Design and modeling of a compact compliant stroke amplification mechanism with completely distributed compliance for ground-mounted actuators［EB/OL］.Mechanism and Machine Theory(2022-01-09)［2022-01-29］.https://www.sciencedirect.com/science/article/pii/S0094114X22000258?via%3Dihub.
[12]Dao T P，Huang S C.Design and multi-objective optimization for a broad self-amplified 2-DOF monolithic mechanism［J］.Sādhanā，2017，42(9):1527-1542.
[13]Wu Z，Li Y，Hu M.Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation［J］.Mechanical Sciences，2018，9(2):417-429.
[14]Huang S C，Dao T P.Design and computational optimization of a flexure-based XY positioning platform using FEA-based response surface methodology［J］.International Journal of Precision Engineering and Manufacturing，2016，17(8):1035-1048.
[15]Huang S C，Dao T P.Multi-objective optimal design of a 2-DOF flexure-based mechanism using hybrid approach of grey-taguchi coupled response surface methodology and entropy measurement［J］.Arabian Journal for Science and Engineering，2016，41(12):5215-5231.