Journal of Northeastern University Natural Science ›› 2018, Vol. 39 ›› Issue (6): 813-817.DOI: 10.12068/j.issn.1005-3026.2018.06.011

• Materials & Metallurgy • Previous Articles     Next Articles

Effects of Y on Microstructure and Properties of Ag-based Alloy Targets

ZHANG De-sheng, ZHANG Qin, YU Yun-he, YANG Hong-ying   

  1. School of Metallurgy, Northeastern University, Shenyang 110819, China.
  • Received:2016-02-21 Revised:2016-02-21 Online:2018-06-15 Published:2018-06-22
  • Contact: YANG Hong-ying
  • About author:-
  • Supported by:
    -

Abstract: The influence of different addition amounts of element Y on the microstructure and properties of Ag-based alloy targets was studied by using optical microscope (OM), scanning electron microscope (SEM), energy diffraction spectrum (EDS), hardness tests, electrical conductivity tests and sulfidation resistance tests. The results indicated that when Y content added to the Ag-based alloy target is small, Y mainly exists in form of solid solution and plays an important role in grain refinement. However, adding excess Y leads to the precipitation of the second phase. The Ag-based alloy targets with 0.1wt% Y addition demonstrates the superior properties: higher hardness, lower electrical conductivity and the most optimal sulfidation resistance.

Key words: Ag-based alloy target, yttrium, microstructure, microhardness, electrical conductivity, sulfidation resistance

CLC Number: