ZHANG De-sheng, ZHANG Qin, YU Yun-he, YANG Hong-ying. Effects of Y on Microstructure and Properties of Ag-based Alloy Targets[J]. Journal of Northeastern University Natural Science, 2018, 39(6): 813-817.
[1]Tauchi Y,Takagi K,Nakai J,et al.Ag base alloy thin film and sputtering target for forming Ag base alloy thin film:US 8178174 B2 [P].2012-05-15. [2]Tauchi Y.Ag alloy film for reflective electrodes,and reflective electrode:US20140342104 A1 [P].2014-11-20. [3]Takagi K,Nakai J,Tauchi Y,et al.Ag-Bi-base alloy sputtering target,and method for producing the same:US 7767041 B2 [P].2010-08-03. [4]Nonaka S,Komiyama S.Silver-alloy sputtering target for conductive-film formation,and method for producing same:JPN,WO2014142028 A1 [P].2014-09-18. [5]Suzuki J,Sato T,Tsubota T,et al.Reflective film,reflective film laminate,led,organic el display,and organic el illuminating device:JPN,WO2009041529 A1[P].2009-04-02. [6]王佳夫,林清华,石路,等.银-微量稀土银饰品材料的研究[J].矿冶工程,2004,24(1):89-91.(Wang Jia-fu,Lin Qing-hua,Shi Lu,et al.A study on silver-rare earths ornamental materials[J].Mining and Metallurgical Engineer,2004,24(1):89-91.) [7]储志强.国内外磁控溅射靶材的现状及发展趋势[J].金属材料与冶金工程,2011,39(4):44-49.(Chu Zhi-qiang.The present status and development trend of magnetronsputtering target at home and abroad[J].Metal Materials and Metallurgy Engineering,2011,39(4):44-49.) [8]Bruer G,Szyszka B,Verghl M,et al.Magnetron sputtering—Milestones of 30 years[J].Vacuum,2010,84(12):1354-1359. [9]Park L S.Cathode unit of magnetron sputter for high target utilization[J].Molecular Crystals and Liquid Crystals,2009,514(1):201-531. [10]王继周,石路,王力军,等.稀土在银饰品材料中作用的研究[J].稀土,2001,22(5):26-30.(Wang Ji-zhou,Shi Lu,Wang Li-jun,et al.Effect of RE elements on silver ornamental materials[J].Rare Metal Materials and Engineering,2001,22(5):26-30.)