Ultrasonic and Electrorheological Integrated Polishing Process
ZHANG Lei1， HOU Han2， HAN Yan-jun1， WANG Xin1
1.College of Mechanical Science and Engineering， Jilin University， Changchun 130022， China; 2.Changchun Institude of Optics， Fine Mechanics and Physics， Chinese Academy of Science， Changchun 130033， China.
ZHANG Lei， HOU Han， HAN Yan-jun， WANG Xin. Ultrasonic and Electrorheological Integrated Polishing Process[J]. Journal of Northeastern University Natural Science, 2019, 40(3): 356-359.
[1]Cheng K，Huo D.Micro-cutting:fundamentals and applications［M］.London:Wiley， 2013. [2]Mahardika M，Mitsui K.A new method for monitoring micro-electric discharge machining processes［J］.International Journal of Machine Tools & Manufacture，2008，48(3):446-458. [3]Trimmer A L，Hudson J L，Kock M，et al.Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses［J］.Applied Physics Letters，2003，82(19):3327-3329. [4]Teixidor D，Ciurana J.Optimization of process parameters for pulsed laser milling of micro-channels on AISI H13 tool steel［J］.Robotics and Computer-Integrated Manufacturing，2013，29(1):209-218. [5]Nellen P M，Brnnimann R.Milling micro-structures using focused ion beams and its application to photonic components［J］.Measurement Science & Technology，2006，17(5):943-948. [6]Romano-Rodríguez A，Hernández-Ramírez F.Dual-beam focused ion beam(FIB):a prototyping tool for micro and nanofabrication［J］.Microelectronic Engineering，2007，84(5/6/7/8):789-792. [7]Horsch C，Schulze V，Lhe D.Deburring and surface conditioning of micro milled structures by micro peening and ultrasonic wet peening［J］.Microsystem Technologies，2006，12(7):691-696. [8]Guo B，Zhao Q L，Hou Y，et al.Ultrasonic vibration assisted grinding of microstructures on binderless tungsten carbide(WC)［J］.Key Engineering Materials，2015，625:475-479. [9]Zhang L，He X S，Yang H R，et al.An integrated tool for five-axis electrorheological fluid-assisted polishing［J］.International Journal of Machine Tools & Manufacture，2010，50(8):737-740. [10]Zhang L，Zhao Y W，He X S，et al.An investigation of effective area in electrorheological fluid-assisted polishing of tungsten carbide［J］. International Journal of Machine Tools & Manufacture，2008，48(3):295-306.
