Abstract: In order to precisely measure the actuation property of a piezoelectric actuator(PA) on micro/nano scale， an improved subpixel block matching algorithm with an optimal block size was used to measure micro/nano displacement， and combined with the Preisach model， a new hysteresis modeling method was proposed. First， the relationship between block size and measurement precision was investigated and the optimal block size was obtained with respect to a standard block. Then， the Preisach model was introduced to model the hysteresis behavior of a piezoelectric actuator. Finally， experiments with a nanometer movement platform system showed the feasibility and validity of the proposed method.

Key words: piezoelectric actuator, hysteresis behavior, image block matching, Preisach model, optimal block size