东北大学学报(自然科学版) ›› 2025, Vol. 46 ›› Issue (2): 96-103.DOI: 10.12068/j.issn.1005-3026.2025.20230253

• 机械工程 • 上一篇    下一篇

电火花加工单晶硅微结构的表面质量及成形精度

孙瑶(), 董俊逸, 唐本甲, 李思慧   

  1. 东北大学 机械工程与自动化学院,辽宁 沈阳 110819
  • 收稿日期:2023-11-21 出版日期:2025-02-15 发布日期:2025-05-20
  • 通讯作者: 孙瑶
  • 作者简介:孙 瑶(1990—),女,辽宁锦州人,东北大学副教授.
  • 基金资助:
    辽宁省自然科学基金资助项目(2024-MSBA-39);中央高校基本科研业务费专项资金资助项目(N2403011);国家自然科学基金资助项目(U23A20633);中国博士后科学基金资助项目(2024MD754246)

Surface Quality and Forming Accuracy of Monocrystalline Silicon Microstructures by Electrical Discharge Machining

Yao SUN(), Jun-yi DONG, Ben-jia TANG, Si-hui LI   

  1. School of Mechanical Engineering & Automation,Northeastern University,Shenyang 110819,China.
  • Received:2023-11-21 Online:2025-02-15 Published:2025-05-20
  • Contact: Yao SUN

摘要:

以电火花加工(EDM)P型单晶硅为实验对象,探究单晶硅加工表面的形貌特征及微观放电凹坑特性,揭示电火花加工单晶硅的材料去除机理,即应力蚀除作用大于熔化和气化蚀除作用.开展单晶硅微槽和微孔的加工工艺实验研究,探究电火花加工单晶硅微结构的成形精度、尺寸偏差、截面轮廓起伏高度和表面质量,揭示主要加工参数对电火花加工单晶硅的材料去除率、表面形貌、表面粗糙度的影响规律.

关键词: 单晶硅, 电火花加工, 微槽, 微孔, 表面形貌, 成形精度

Abstract:

Taking the electrical discharge machining (EDM) of P-type monocrystalline silicon as the experimental subject, the surface morphology features and microscopic discharge pit characteristics of the monocrystalline silicon were investigated. It was revealed that the material removal mechanism of the monocrystalline silicon is dominated by stress erosion, which is more significant than melting and vaporization erosion. An experimental research on EDM of monocrystalline silicon microstructures, including micro-grooves and micro-holes, was done to explore the forming accuracy, size deviations, fluctuation height of the cross-sectional profiles, and surface quality of the EDM-processed microstructures, revealing the influence of the main processing parameters on the material removal rate, surface morphology, and surface roughness of the EDM-processed monocrystalline silicon.

Key words: monocrystalline silicon, electrical discharge machining, micro-groove, micro-hole, surface morphology, forming accuracy

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