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    Interval Prediction Model of RF-ET-KDE Sintering Process Physical Index Based on Stacking Integration
    Zeng-xin KANG, Jin-chao CHEN, Jin-yang WANG, Zhao-xia WU
    Journal of Northeastern University(Natural Science)    2024, 45 (10): 1369-1378.   DOI: 10.12068/j.issn.1005-3026.2024.10.001
    Abstract908)   HTML65)    PDF(pc) (2555KB)(962)       Save

    Due to the many uncertainties in the sintering process, the reliability of mechanism analysis and point prediction results is insufficient. Therefore, a random forest-extreme tree-kernel density estimation (RF-ET-KDE) algorithm is proposed to realize interval predictions for physical indicators, such as particle size and moisture. Firstly, data preprocessing and feature selection operations are adopted to screen out the most suitable feature variables for modeling. Secondly, the RF-ET algorithm based on Stacking is utilized to realize point predictions for the indicators. This algorithm makes the model with higher accuracy and generalization, and then the KDE algorithm is adopted to calculate the prediction error of the indicator. The distribution interval and interval prediction results under a certain confidence level are obtained. Finally, the proposed model is compared with the other combined models. The results show that the RF-ET algorithm has higher point prediction accuracy, and the KDE algorithm can quantify the error of the indicator very well, so that a higher credibility interval prediction result can be obtained.

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    Segmentation Method for Glass-like Object Based on Cross-Modal Fusion
    Ying-cai WAN, Li-jin FANG, Qian-kun ZHAO
    Journal of Northeastern University(Natural Science)    2025, 46 (1): 1-8.   DOI: 10.12068/j.issn.1005-3026.2025.20230204
    Abstract888)   HTML85)    PDF(pc) (2021KB)(454)       Save

    Due to the lack of distinct textures and shapes, objects such as glass and mirrors pose challenges to traditional semantic segmentation algorithms, compromising the accuracy of visual tasks. A Transformer‑based RGBD cross‑modal fusion method is proposed for segmenting glass‑like objects. The method utilizes a Transformer network that extracts self‑attention features of RGB and depth through a cross‑modal fusion module and integrates RGBD features using a multi‑layer perceptron (MLP) mechanism to achieve the fusion of three types of attention features. RGB and depth features are fed back to their respective branches to enhance the network's feature extraction capabilities. Finally, a semantic segmentation decoder combines the features from four stages to output the segmentation results of glass‑like objects. Compared with the EBLNet method, the intersection‑and‑union ratio of the proposed method on the GDD, Trans10k and MSD datasets is improved by 1.64%, 2.26%, and 7.38%, respectively. Compared with the PDNet method on the RGBD-Mirror dataset, the intersection‑and‑union ratio is improved by 9.49%, verifying its effectiveness.

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    Cooperative Platoon Control of Connected and Automated Vehicles Based on Fixed-Time Disturbance Observer
    Xiang LI, Zhen-chao SUN, Zhen-yu GAO
    Journal of Northeastern University(Natural Science)    2024, 45 (11): 1521-1528.   DOI: 10.12068/j.issn.1005-3026.2024.11.001
    Abstract803)   HTML26)    PDF(pc) (2041KB)(297)       Save

    The cooperative platoon control of connected and automated vehicles with model uncertainties and external disturbances is investigated. A fixed?time disturbance observer (DO) is proposed, with which the compound disturbance (i. e. , model uncertainties and external disturbances) can be estimated accurately within settling time. Based on the DO, backstepping method and fixed?time theory, a novel controller is further designed to ensure that all signals of the closed?loop system have fixed?time stability, which ensures that the tracking error between vehicles converges to zero within a settling time, and the convergence time only depends on the controller parameters. Through Lyapunov stability theory, both individual vehicle stability and string stability are guaranteed. Finally, a simulation of five?vehicle platoon control verifies the effectiveness of the proposed scheme.

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    Pedestrian Trajectory Prediction Algorithm Based on Graph Convolution and Convolution
    Ang FENG, Jun GONG, Nian WANG, Jing-long WANG
    Journal of Northeastern University(Natural Science)    2024, 45 (11): 1529-1536.   DOI: 10.12068/j.issn.1005-3026.2024.11.002
    Abstract734)   HTML16)    PDF(pc) (1902KB)(181)       Save

    Significant progress has been made in pedestrian trajectory prediction, but most of the existing methods are constrained by the limited on?board computing resources. How to achieve efficient pedestrian trajectory prediction in autonomous vehicles is still insufficient. To solve this problem, a lightweight pedestrian trajectory prediction algorithm is proposed, which uses convolutional neural network (CNN) and graph convolutional neural network (GCN) to process and integrate multimodal information. Firstly, a multi?scale feature processing module is designed based on CNN. Multiple convolution modules are used to capture the features of pedestrian tracks and scene information at different time and spatial scales. Then, a feature integration module is constructed based on GCN, which is used to efficiently integrate the spatial?temporal relationship between trajectory and scene features and obtain multiple prediction representations. Finally, multiple prediction representations are integrated to obtain pedestrian trajectory prediction results. Experiments on PIE and JAAD datasets show that the proposed method achieves competitive and optimal prediction performance with the least network parameters, respectively, which verifies the effectiveness of the proposed method. Compared with the previous lightest method, the parameters are optimized by 73%.

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    Verifiable Fully Homomorphic Encryption Based on Zero‑Knowledge Succinct Non‑interactive Arguments of Knowledge
    Jin-tong SUN, Fu-cai ZHOU, Qiang WANG, Che BIAN
    Journal of Northeastern University(Natural Science)    2024, 45 (11): 1537-1546.   DOI: 10.12068/j.issn.1005-3026.2024.11.003
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    Homomorphic encryption (HE) is severely limited in its practical deployment due to low execution efficiency and the inability to ensure data integrity, particularly in scenarios with strict latency requirements. To address such issues and enhance general applicability, a new HE scheme is proposed. To improve execution efficiency, a multithreaded matrix multiplication (MMM) algorithm is designed. With the MMM algorithm, encryption tasks can be decomposed and distributed across multiple threads for parallel execution, thus achieving acceleration. To tackle data tampering in malicious server environments, a verifiable encryption mechanism is designed using zk-SNARK techniques to protect the integrity of ciphertext in outsourced computations. By combining MMM, an efficient verifiable fully homomorphic encryption based on zk-SNARK (zk-VFHE) was developed. Theoretical analysis and experimental results demonstrate that zk-VFHE outperforms similar protocols in terms of both execution speed and security.

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    Heart Anomaly Detection Algorithm Based on Multimodal Feature Engineering and TSNet
    Ji-hong LIU, Wei XUE, Chao XU
    Journal of Northeastern University(Natural Science)    2024, 45 (10): 1394-1400.   DOI: 10.12068/j.issn.1005-3026.2024.10.004
    Abstract725)   HTML13)    PDF(pc) (4015KB)(404)       Save

    Electrocardiogram (ECG) and Phonocardiogram (PCG) are commonly used diagrams in heart diseases diagnosis. While, using them alone for heart disease diagnosis is not effective. Based on multimodal feature engineering, after segmentation and normalization preprocess of the dataset, Gramiam angle fields (GAF) are used for time?series data reconstruction to form an image model. Additionally, a two?stream self?fusion network (TSNet) suitable for this image model is proposed, which replaces the bottom?layer convolution operations with a two?stream self?fusion (TS) module to better integrate the heterogeneous information of ECG and PCG. Tested on the PhysioNet Challenge 2016 a dataset, the proposed algorithm achieves best values of accuracy, F1 score, precision, and recall at 95.3%, 95.4%, 96.2%, and 99.4%, respectively. Compared to other multimodal convolutional neural network algorithms for ECG and PCG, it shows higher accuracy.

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    CT Diagnosis Method for Coronavirus Pneumonia with Integrated Multi-scale Attention Mechanism
    Peng SHAN, Lin ZHANG, Hong-ming XIAO, Yu-liang ZHAO
    Journal of Northeastern University(Natural Science)    2024, 45 (12): 1673-1679.   DOI: 10.12068/j.issn.1005-3026.2024.12.001
    Abstract717)   HTML22)    PDF(pc) (2222KB)(220)       Save

    Artificial intelligence (AI)‑based diagnosis has become an important auxiliary method for detecting lung infections. However, most existing approaches rely on deep learning, which are often plagued by issues such as insufficient model stability, high complexity, and low accuracy. This paper presents a shallow model which incorporates a multi‑scale attention mechanism to achieve both high accuracy and a simple structure for diagnosing COVID‑19 from CT scans. Firstly, two datasets of COVID‑19 CT images are combined into a single dataset to address the issue of model instability caused by insufficient data. Secondly, by introducing multi‑scale attention(MA) in the final three layers of the shallow ResNet18 network, the model’s feature extraction capability is enhanced. Finally, classifier with three fully connected layers (CTFCL) is constructed to improve the classification performance of the model, thereby increasing the accuracy of lung CT classification. Experimental results show that the proposed model achieves an accuracy of 95.41%, outperforming networks such as ResNet50, ResNet101, VGG16, and DenseNet169. Furthermore, the model has only 12.24×106 parameters, which is approximately 50% fewer than networks like ResNet50 and VGG16.

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    Air Permeability Prediction of Sinter Layer Based on TST-LSTM Model
    Meng-yuan LIU, Zhao-xia WU, Jin-yang WANG, Guang-lei XIA
    Journal of Northeastern University(Natural Science)    2024, 45 (10): 1379-1385.   DOI: 10.12068/j.issn.1005-3026.2024.10.002
    Abstract701)   HTML23)    PDF(pc) (1484KB)(332)       Save

    In the sintering process, the air permeability of the sinter layer significantly impacts sinter quality. Therefore, it is essential to construct a model for accurately air permeability prediction of the sinter layer. Due to the inadequacy of traditional coding?decoding models in handling time series dependencies,time?series transformer-long short?term memory network (TST-LSTM) model is proposed. This model leverages the decoding component of the transformer model and combines the advantages of LSTM to achieve realtime prediction of air permeability of the sinter layer. Comparative analysis with simulation results from traditional backpropagation neural network (BPNN), support vector regression (SVR), and long shortterm memory (LSTM) models demonstrates that TST-LSTM exhibits superior and more stable prediction performance. The proposed method is validated through simulation predictions based on actual sintering processes.

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    Transformer-based Multi-scale Underwater Image Enhancement Network
    Ai-ping YANG, Si-jie FANG, Ming-fu SHAO, Teng-fei ZHANG
    Journal of Northeastern University(Natural Science)    2024, 45 (12): 1696-1705.   DOI: 10.12068/j.issn.1005-3026.2024.12.004
    Abstract693)   HTML17)    PDF(pc) (2486KB)(690)       Save

    CNN(convolutional neural network)‑based underwater image enhancement methods neglect global visual perception, leading to color distortion and contrast degradation.

    A Transformer‑based multi‑scale underwater image enhancement network (MTransNet) is proposed. To address the problem of lacking global visual perception, a position encoding module is designed based on underwater image priors and a Swin Transformer module which is applicable to underwater scenes is constructed. Furthermore, self‑attention mechanism is built to improve global perception performance. As for the detail blurring that exists in current methods, a CNN module is developed to capture local features such as textures or edges, to improve local perception performance. The transfer fusion module is built to transfer global attention of Swin Transformer to local convolutional feature, achieving full fusion and utilization of global feature and local feature. The PSNR value on subsets of EUVP can reach up to 23.47 dB, which demonstrates the method can significantly enhance global visual perception and increase image visual quality.

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    Analytical Solution of Surrounding Rock Stress and Displacement in Bidirectional Unequal Pressure Stope Under Supporting Stress
    Zhi-peng XIONG, Yuan-hui LI, Kun-meng LI, Gui-xuan XIAO
    Journal of Northeastern University(Natural Science)    2024, 45 (12): 1759-1768.   DOI: 10.12068/j.issn.1005-3026.2024.12.011
    Abstract693)   HTML6)    PDF(pc) (1644KB)(305)       Save

    The stability of inclined rectangular stope is closely related to the stress and displacement distribution of stope roof in underground mines. However, the current theoretical method for stress and displacement of surrounding rock in rectangular excavation has a significant error when applied to inclined rectangular stopes with large width‑height ratio, and the influence of excavation dip angle and supporting stress is not considered. Based on the complex function theory, this paper puts forward the mapping function expression of inclined rectangular stope with large width‑height ratio, and derives the analytical solution of stress and displacement of surrounding rock in stope under bidirectional unequal pressure and supporting stress. Besides, the influence of stope dip angle, width‑height ratio and supporting stress on stress and displacement distribution of stope roof is analyzed. The results show that the deviation between analytical solution and FLAC simulation solution is less than 5%. In addition, the asymmetric distribution trend of stress and displacement around stope roof intensifies as the stope dip angle increases, and the degree of pressure relief and vertical displacement gradually decreases. With the increase of stope width‑height ratio, the pressure relief degree and the displacement of stope roof gradually increase. The supporting stress exerted by supporting bodies can improve the stress environment of surrounding rock and reduce the roof subsidence.

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    Active Obstacle Avoidance Path Planning for Multi-scenario Autonomous Vehicles Under Icy and Snowy Road Conditions
    Yu-long PEI, Shuang-zhu ZHAI
    Journal of Northeastern University(Natural Science)    2025, 46 (3): 1-11.   DOI: 10.12068/j.issn.1005-3026.2025.20239039
    Abstract680)   HTML56)    PDF(pc) (4698KB)(797)       Save

    Addressing the issue of autonomous vehicles’ instability on icy and snowy roads, an improved rapidly-exploring random tree (RRT) path planning algorithm is proposed. Firstly, a dynamic model introducing road adhesion coefficient on icy and snowy roads is established. Secondly, the global target deflection sampling combined with the front pointing and steering angle of the vehicle, combined with the collision avoidance detection and the maximum curvature constraint under the velocity-adhesion coefficient, is used to improve the traditional RRT algorithm problem.Finally, a double quintic polynomial is used for path smoothing to ensure stability, brake constraints, and comfort. The performance of the improved algorithm RRT is compared with that of the traditional algorithm under multi-scenario conditions through the joint simulation of MATLAB-Simulink and CarSim. The experiments show that the improved RRT algorithm significantly improves the path smoothness, reduces the curvature mutation, has short time, high success rate and good stability when driving on ice and snow.

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    Sea-Surface Weak Target Detection Method Based on SPWVD-STFT
    Yi CHENG, Yang WANG
    Journal of Northeastern University(Natural Science)    2024, 45 (10): 1401-1408.   DOI: 10.12068/j.issn.1005-3026.2024.10.005
    Abstract675)   HTML10)    PDF(pc) (2912KB)(434)       Save

    To further improve the capability of time?frequency domain features to detect weak targets on the sea?surface, a smoothed pseudo Wigner-Ville distribution (SPWVD)-short?time Fourier transform (STFT) sea?surface weak target detection algorithm is proposed. Firstly, STFT is adopted to perform time?frequency features analysis on the echo signals, and to optimize the time?frequency features analysis results of SPWVD. The K-medoids clustering algorithm is introduced to denoise the time?frequency matrix. Then, the time?frequency features Doppler frequency stability (DFS) is extracted, and the fast convex hull learning algorithm is utilized to obtain the false alarm controllable judgment region, so as to determine the sea clutter and the target. Finally, results of experiments based on Ice multiparameter imaging X-Band radar (IPIX) measured data show that the detection probability of the proposed detection algorithm is 6.3% higher than that of the time?frequency tri?feature detector at the same false alarm rate.

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    Connection Between Precast Steel-Concrete-Steel Sandwich Slab and Column and Finite Element Analysis
    Bai-ling CHEN, Yue YIN, Hai-yang GAO, Lian-guang WANG
    Journal of Northeastern University(Natural Science)    2024, 45 (10): 1476-1484.   DOI: 10.12068/j.issn.1005-3026.2024.10.014
    Abstract672)   HTML57)    PDF(pc) (4564KB)(349)       Save

    In order to meet the bearing requirements of prefabricated composite slab?column joints, two types of connection joints between steel?concrete?steel sandwich slab and structural column are proposed. Using ABAQUS finite element software, the numerical calculation model of composite slab column joint is established, and the bearing capacity of precast joint under punching load and the influence of main design parameters on its mechanical and deformation properties are analyzed. The results show that, compared with the cast?in?place joints under the same condition, the prefabricated connection joints can significantly increase the punching shear capacity while ensuring good ductility. These indicate that the connection components can make a positive contribution to the punching shear resistance of the joints.In addition, it is recommended to use a 16 through bolts radial arrangement and choose a square or cross shaped external diaphragm in the external diaphragm?thru bolt connection. The diaphragm’s strength grade is consistent with the composite slab, which is taken as Q345. For the cantilever composite slab?circumferential flange connection, it is suggested that the flange thickness should be controlled at about 20 mm, so as to make the joint own a higher cost performance.

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    Multi-UUV Formation Obstacle Avoidance Method Based on Improved Artificial Potential Field
    Hong-li XU, Ben-qing JIA, Kuo LUAN
    Journal of Northeastern University(Natural Science)    2024, 45 (11): 1547-1556.   DOI: 10.12068/j.issn.1005-3026.2024.11.004
    Abstract669)   HTML5)    PDF(pc) (2026KB)(574)       Save

    A formation obstacle avoidance strategy is proposed based on the improved artificial potential field method to optimize the cooperative obstacle avoidance path of multi?UUV in an unknown underwater environment, which is prone to the local minimum problem and the loss of formation communication due to formation dispersion. Firstly, the formation control between multi?UUV is established based on the pilot?following method, and an improved artificial potential field function in exponential form is used to solve the emergency steering problem caused by the sudden change of the potential field in the traditional form. Meantime, while the effects of forward speed and deviation angle are introduced in the repulsion field, and the deviation degree repulsion combined with the trim angle is introduced to optimize the final obstacle avoidance control command, and a virtual point guidance method is used to solve the local minimum problem. Finally, a cooperative obstacle avoidance strategy for UUV is designed to optimize the formation deviation and recovery time, taking into account the effect of formation. The experimental results verify the effectiveness of the proposed algorithm in multi?UUV formation obstacle avoidance.

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    CNN-Transformer Dehazing Algorithm Based on Global Residual Attention and Gated Feature Fusion
    Hai-yan LI, Ren-chao QIAO, Hai-jiang LI, Quan CHEN
    Journal of Northeastern University(Natural Science)    2025, 46 (1): 26-34.   DOI: 10.12068/j.issn.1005-3026.2025.20239041
    Abstract662)   HTML23)    PDF(pc) (8026KB)(493)       Save

    To address the shortcomings of existing image dehazing algorithms, such as the lack of global contextual information, inadequate performance in dealing with non‑uniform haze, and the introduction of noise during the reuse of detailed information, a CNN-Transformer dehazing algorithm based on global residual attention and gated feature fusion is proposed. Firstly, a global residual attention mechanism is introduced to adaptively extract the detailed features from non‑uniform haze regions, and cross‑dimensional channel‑spatial attention is designed to optimize information weights. Thereafter, a global modelling Transformer module is proposed to deepen the feature extraction process of the encoder, and a Swin Transformer with parallel convolutions is constructed to capture the inter‑feature dependencies. Finally, a gated feature fusion decoder module is designed to reuse the texture information required for image reconstruction, to filter out irrelevant haze noise, and thereby to improve dehazing performance. Qualitative and quantitative experiments conducted on four publicly available datasets indicate that the proposed algorithm can effectively handle non‑uniform haze regions, reconstruct high‑fidelity haze‑free images with fine textures and rich semantics, and achieve higher peak signal‑to‑noise ratio and structural similarity index compared to the classic algorithm.

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    Shear Performance of Headed Studs in UHPC Containing Small Coarse Aggregates
    Yan WANG, Zhe-chao WANG, Chang-hao LI, Peng CUI
    Journal of Northeastern University(Natural Science)    2024, 45 (11): 1604-1611.   DOI: 10.12068/j.issn.1005-3026.2024.11.011
    Abstract660)   HTML8)    PDF(pc) (1157KB)(1190)       Save

    With the increasing span of steel-UHPC lightweight composite girders and the horizontal shear force in girders, the design of shear performance of headed studs in the lightweight composite girders becomes increasingly critical. The shear performance of headed studs between steel and UHPC with small coarse aggregates is studied via standard push?out specimens. The load?slippage behavior and failure mode of standard specimens are revealed, and the calculation methods for shear stiffness and capacity of single headed stud are proposed. Test results show that the failure mode of specimens is that the roots of headed studs are cut off. The failure slippage range of the push?out specimen is between 0.5~1.2 mm, and the ultimate shear strength of the single headed stud is 400.7 MPa. Theoretical calculation results show that according to existing design specifications, the shear stiffness is designed safely at the half failure load or the slippage of 0.2 mm. The design shear capacity of the single headed stud is calculated in the range of 95.51~129.20 kN, which was only 62.7%~84.8% of the test results. Therefore, when designing headed studs for UHPC deck panels with small coarse aggregates, the shear stiffness should consider a reduction coefficient of 0.57~0.73, and the shear capacity should not be reduced.

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    Properties and Hydration Mechanism of Lime-Based Slag‑Steel Slag Composite Cementitious Materials
    Ying WANG, Xiao-wei GU, Qing WANG, Xiao-chuan XU
    Journal of Northeastern University(Natural Science)    2024, 45 (10): 1459-1468.   DOI: 10.12068/j.issn.1005-3026.2024.10.012
    Abstract654)   HTML14)    PDF(pc) (8684KB)(372)       Save

    To analyze the properties and hydration mechanism of lime?based slag?steel slag composite cementitious materials, discussions are conducted on the mechanical properties and working performance of the composite cementitious materials with different steel slag and lime mass fraction. Furthermore, detection methods such as XRD are employed to explore the hydration mechanism of the composite cementitious materials. The research results indicate that the optimal steel slag content in lime?based slag?steel slag composite cementitious materials is 30%. The compressive strength is 32.3 MPa after 28 d of maintenance. The primary hydration products of the composite cementitious materials are C-(A)-S-H gel, hydrocalumite, Ca(OH)2, and calcite, among which the interlocking C-(A)-S-H gel provides the primary compressive strength for the composite cementitious materials. When the steel slag content in the composite cementitious materials ranges from 20% to 30%, it does not significantly affect the formation of C-(A)-S-H gel in the cementitious materials and can promote the hydration of slag. An appropriate amount of steel slag exhibits a filling effect, reducing microcracks in the composite cementitious materials, making the matrix more compact, and enhancing the mechanical properties of the composite cementitious materials.

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    Surface Defect Detection of Riveting Holes Based on Improved YOLOv8
    Bo HAO, Xin-yan XU, Yu-xin ZHAO, Jun-wei YAN
    Journal of Northeastern University(Natural Science)    2024, 45 (11): 1595-1603.   DOI: 10.12068/j.issn.1005-3026.2024.11.010
    Abstract653)   HTML3)    PDF(pc) (3375KB)(536)       Save

    The surface quality of riveting holes on aircraft skin, tail and other components is crucial to the overall assembly performance of an aircraft. Currently, most riveting hole defect detection relies on the traditional manual methods, which are prone to missing detection. An improved detection method based on YOLOv8 for surface defect detection of riveting holes was proposed. The conventional convolution was replaced by deformable convolution to solve the problem of the fixed receptive field shape in feature extraction. The SimAM attention mechanism was embedded in order to enhance the recognition ability of the network under low contrast between the background and targets. The CIoU loss function was replaced by the WIoU bounding box regression loss function to reduce the impact of low?quality images during model training and improve the robustness and generalization ability of the model. To verify the performance of the improved model, 6061 aluminum alloy plates with riveting holes were used as a substitute for aircraft skin in the detection process. Experimental results demonstrated that the improved model achieved mAP_0.5 and accuracy of 0.918 and 0.920 on the riveting hole test set, which represents an improvement of 24.1% and 25.3% compared to the original model.

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    Research Progress on the Corrosion Failure Behavior of Coatings on Aluminum Alloy for Semiconductor Fabrication Equipment
    Yang ZHAO, Yu-hang WANG, Tao ZHANG, Fu-hui WANG
    Journal of Northeastern University(Natural Science)    2025, 46 (3): 28-45.   DOI: 10.12068/j.issn.1005-3026.2025.20240182
    Abstract636)   HTML19)    PDF(pc) (5616KB)(653)       Save

    In the semiconductor fabrication equipment, the coatings on aluminum alloy often fail due to the coupling effect of high-temperature, vacuum and aggressive gases, including their plasma. In the chlorine-based plasma, the anodized coating has a high etching rate, leading to rapid removal, while the etching rate of Y2O3 coatings is approximately one in 50 of that of the anodized coating. In the fluorine-based plasma, both the anodized coating and Y2O3 coatings experience particle contamination due to the fluoride layer peeling. The corrosion resistance of the anodized coating can be significantly enhanced by adjusting the composition and temperature of the electrolyte or depositing a pure aluminum layer on the aluminum alloy surface. Additionally, improving the density of Y2O3 coatings can reduce their etching rate. Combining these strategies with remote plasma cleaning techniques can minimize the impact of charged particles on chamber materials, significantly reducing particle contamination in the reaction chamber. During the etching and thin film deposition processes, changes in the chamber surface composition can alter the plasma state, leading to various process defects.

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    PI Control Strategy for the Moving Speed of Flexible Robotic Arms
    Xiao-peng LI, Guo-wen CHEN, Meng YIN, Jia-xing FU
    Journal of Northeastern University(Natural Science)    2024, 45 (10): 1409-1416.   DOI: 10.12068/j.issn.1005-3026.2024.10.006
    Abstract628)   HTML6)    PDF(pc) (1798KB)(1090)       Save

    A flexible robotic arm and its flexible load may result in changes to such specific parameters as rotational inertia as the arm’s posture changes, subsequently affecting the output speed of the servo drive system. By using a pole placement method with the same damping coefficient, the parameters of the proportional-integral (PI) controller in the drive system are adjusted, enabling the PI controller to automatically adjust its parameters in response to changes in the robotic arm’s posture, thereby dynamically stabilizing the motor’s output speed. A mathematical model is established based on the Lagrangian principles and continuum vibration theory, and the transfer function is obtained through state equations. The PI controller parameters are adjusted using the pole placement method with the same damping coefficient and applied to the speed loop control. The impact of the damping coefficient and natural frequency on the system’s resonance peak, resonance frequency, and bandwidth is analyzed. Numerical simulation demonstrates that appropriately adjusting the damping coefficient can reduce speed fluctuations in the servo drive system. A comparison with the Ziegler-Nichols self-tuning (Z-N) method shows that the pole placement method with the same damping coefficient achieves system stability in a shorter time.

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